Mar 29, 2024  
2015 - 2016 CNM Catalog, Volume 48.1 
    
2015 - 2016 CNM Catalog, Volume 48.1 [The CNM Academic Year includes Fall, Spring, Summer Terms]

MEMS 1101 - Plasma - RF - Vacuum Systems Theory

2 credit hour(s)
Prerequisite: ELEC 1202  + ELEC 1292  or department approval.

Presents RF energy, vacuum technology and vacuum systems applications in manufacturing industries. Includes safety, plasma physics, RF applications, RF generators, transmission lines, RF interference, gas laws and properties, operation and applications of vacuum pumps, gauges and valves and systems leak detection.