Mar 28, 2024  
2015 - 2016 CNM Catalog, Volume 48.1 
    
2015 - 2016 CNM Catalog, Volume 48.1 [The CNM Academic Year includes Fall, Spring, Summer Terms]

MEMS 2102 - Manufacturing Process Theory

2 credit hour(s)
Prerequisite: MEMS 1002  + MEMS 1092  or department approval. Corequisite: MEMS 2192 .

Focuses on Microelectromechanical systems (MEMS) surface and bulk fabrication processes including photolithography, wet and dry anisotropic and isotropic etch, and thin film deposition methods. These processes are also used in semiconductor and nanotechnology applications. No books required, all is provided online and includes reading, animations, and streaming lecture educational materials.