Mar 28, 2024  
2015 - 2016 CNM Catalog, Volume 48.1 
    
2015 - 2016 CNM Catalog, Volume 48.1 [The CNM Academic Year includes Fall, Spring, Summer Terms]

MEMS 2001 - MEMS Manufacturing Process

5 credit hour(s)
Prerequisite: MEMS 1001 + ELEC 1010  or department approval.

Covers the various construction methods used to manufacture MEMS components and systems. Bulk micro-machining, surface micro-machining processes such as SUMMIT IV, MUMPS will be covered in detail.