2credit hour(s)Prerequisite:MEMS 2102 or department approval. Pre- or corequisite:MEMS 2015. Focuses on Microelectromechanical systems (MEMS) fabrication process control, characterization and development principals. Topics include application of characterization and optimization of fabrication processes principals in a cleanroom environment including the application of design of experiments and process control concepts, and metrology (measurement) theory. No books are required for this course, all materials will be provided online and lab materials will be supplied.