3credit hour(s)Prerequisite:MEMS 1002 + MEMS 1092 + MEMS 2102 or department approval. Corequisite:MEMS 2092. Focuses on Microelectromechanical systems (MEMS) fabrication process control, characterization and development principals. Topics include characterization and optimization of fabrication processes including, but not limited to photolithography, etch, thin film deposition, process interaction with materials, design of experiments and process control concepts, and metrology (measurement) theory. No books are required for this course, all materials will be provided online.