May 20, 2024  
2012 - 2013 CNM Catalog June 2012, Volume 45 
    
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2012 - 2013 CNM Catalog June 2012, Volume 45 [The CNM Academic Year includes Fall, Spring, Summer Terms]

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MEMS 2001 - MEMS Manufacturing Process

5 credit hour(s)
(Prerequisite: MEMS 1001 + ELEC 1010  or department approval)

Covers the various construction methods used to manufacture MEMS components and systems. Bulk micro-machining, surface micro-machining processes such as SUMMIT IV, MUMPS will be covered in detail.


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